This paper presents the design, fabrication and
characterization of a magnetically actuated scanning
microlens for miniature confocal Near Infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer diagnosis. The microlens is comprised of a 20μm thick ferromagnetic nickel platform integrated with a PDMS plano-convex lens with a diameter of 1.25 mm and an effective focal length of 2.0 mm. Thiswork demonstrates a microlens with a scanning angle of ±24° driven by an external AC magnetic field orientated at an angle of 30° from the horizontal rotation axis. A coplanar 152μm scanning range is
demonstrated by a 22.2×10-3 Tesla external magnetic field at 197Hz.
Magnetically actuated microlens, MOEMS,
Near-IR Rama spectroscopy, Skin cancer diagnosis,
Ferromagnetic nickel, PDMS polymer microlens