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SBQMI Advanced Nanofabrication Facility (ANF)
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    • Kostis Michelakis
    • Mario Beaudoin
    • Andrey Blednov
    • Khush Hydri
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    • Josh Folk
    • Lukas Chrostowski
    • Alina Kulpa
    • Jim Mackenzie
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  • AMPEL
  • Click for video

    The new SBQMI Nanofab cleanroom

    Renovated Cleanroom The facility’s cleanroom is contained within Labs 446 in Brimacombe’s AMPEL wing, and the available floor area is obviously limited by the overall room footprint. In the old configuration, a considerable part of this area was taken by so-called gray space, housing, among other things, vacuum systems, process gases, and other support infrastructure. […]

  • Vanguard Photonic Wire Bonding Tool

    The SBQMI now has a photonic wire bonding tool:        

  • JBX-8100FS image

    JEOL JBX-81OOFS ELECTRON-BEAM LITHOGRAPHY SYSTEM

    SBQMI has invested heavily on acquiring a state-of-the-art electron-beam lithography tool that enables device fabrication at the nanoscale, where quantum properties of materials manifest themselves. An intense, well formed and focused beam of electrons, scanned by precision electronics and driven by computer design data, can directly write features of a few nanometers in size on […]

  • ACTUATED SCANNING MICROLENS FOR NIR RAMAN SPECTROSCOPY

    Chin-Pang-Billy Siu and Mu Chiao Dept of Mechanical Engineering, The University of British Columbia, Canada Haishan Zeng, BC Cancer Agency, Canada   This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal Near Infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer […]

  • Room-temperature operation of a transistor vertical-cavity surface-emitting laser

    X. Yu, Y. Xiang, J. Berggren, T. Zabel, M. Hammar, N.Akram, W. Shi and L. Chrostowski We demonstrate the first room-temperature operation of a transistor vertical-cavity surface-emitting laser (T-VCSEL). Fabricated using an epitaxial regrowth process, the T-VCSEL is electrically a Pnp-type bipolar junction transistor and consists of an undoped AlGaAs/GaAs bottom DBR, an InGaAs triple-quantum-well […]

The Nanofab is the center for device fabrication at UBC for multidisciplinary applications including microfabrication of microfluidics devices (for proteomics, DNA sequencing, lab-on-chip, cell cultures), photonics (photonic crystals, lasers, modulators), and nano-electronics (carbon nanotube devices, graphene electronics).
The facility is used by research groups from the faculties of Applied Science, Science and Dentistry, as well as off-campus academic and industrial users.

The Nanofabrication Facility is a cleanroom laboratory situated on the fourth floor of the AMPEL building.

The AMPEL Nanofabrication Facility is a fee-based laboratory open to UBC and outside users, as a service, or for trained users. As a service laboratory in Vancouver, our experienced process staff are available to perform fabrication tasks ranging from single steps to full device fabrication. To gain access to the facility and for any other enquiries, please contact the director, Kostis Michelakis, at 604-827-3228 or anf@ampel.ubc.ca.

Equipment reservations are made through Bumblebee …

Note:  As per UBC IT requirements our Bumblebee booking system can only be accessed via UBC VPN when outside of campus.   For people outside UBC needing access to the sites, we can help you obtain a CWL Guest Account (preferred method) or in exceptional cases, access through a firewall.  Here is the link to help you setup the UBC VPN: https://it.ubc.ca/services/email-voice-internet/myvpn/setup-documents.

News

  • Facility Status
Current issues: (May 17, 2022)
  • Room 449 (ISO-7) noise reduction complete
  • MLA head sent for repairs (expect back week of May 23)
  • Oxford ICP etcher now up
Announcements
  • Summer Experimental Skills
  • Week of June 13, contact anf@ampel.ubc.ca for info
  • Users Meeting
  • Friday May 27 @ 12pm (noon) by Zoom
  • Cleaning Party
  • Monday May 30 @ 3pm
  • Next Orientation Lecture
  • Monday June 13, 11:00am by Zoom. Contact anf@ampel.ubc.ca to reserve a spot
Current Cleanroom Conditions: To see the current equipment status, please click on the following link:
Equipment Status
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image - CMC link
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SBQMI Advanced Nanofabrication Facility
Vancouver Campus
2355 East Mall
Vancouver, BC Canada V6T 1Z4
Tel 604 827 3228
Website www.nanofab.ubc.ca
Email anf@ampel.ubc.ca
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