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SBQMI Advanced Nanofabrication Facility (ANF)
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  • Nanofab Accelerator Program

    We are pleased to announce that QMI’s Advanced Nanofabrication Facility (ANF) has just officially launched its Nanofab Accelerator Program in partnership with the National Research Council of Canada Industrial Research Assistance Program (NRC-IRAP). The program will provide eligible SMEs (small or medium-sized businesses) with specialized nanofabrication services, including but not limited to, maskless photolithography, 100kV […]

  • Flexible Polymer-based Capacitive Micromachined Ultrasound Transducers (polyCMUTs): Fabrication and Characterization

    Amirhossein Omidvar, Carlos D Gerardo, Robert Rohling, Edmond Cretu, Antony J Hodgson   Conventional ultrasound (US) probes are rigid. The rigidity has several drawbacks including acoustic energy loss and artifacts (due to interface mismatch between skin and probe), patient discomfort, limited field of view, and operator dependency. Many of these problems could potentially be addressed […]

  • Virtual 3D of the SBQMI/AMPEL ANF Cleanrooms

    Main Nanofab Cleanrooms consisting of: ISO 5 (class 100) yellow room ISO 6 (class 1000) yellow room ISO 6 (class 1000) white room           Electron Beam Lithography Cleanroom ISO 7 (class 10000) white room JEOL JBX-8100FX 100kV Electron Beam Lithography System               Packaging/Workhorse Processes Room […]

  • Vanguard Photonic Wire Bonding Tool

    The SBQMI now has a photonic wire bonding tool:        

  • JBX-8100FS image

    JEOL JBX-81OOFS ELECTRON-BEAM LITHOGRAPHY SYSTEM

    SBQMI has invested heavily on acquiring a state-of-the-art electron-beam lithography tool that enables device fabrication at the nanoscale, where quantum properties of materials manifest themselves. An intense, well formed and focused beam of electrons, scanned by precision electronics and driven by computer design data, can directly write features of a few nanometers in size on […]

  • Nanowire single photon detector

    The single photon detector is fabricated using ebeam lithography and ECR etching …

The Nanofab is the center for device fabrication at UBC for multidisciplinary applications including microfabrication of microfluidics devices (for proteomics, DNA sequencing, lab-on-chip, cell cultures), photonics (photonic crystals, lasers, modulators), and nano-electronics (carbon nanotube devices, graphene electronics).
The facility is used by research groups from the faculties of Applied Science, Science and Dentistry, as well as off-campus academic and industrial users.

The Nanofabrication Facility is a cleanroom laboratory situated on the fourth floor of the AMPEL building.

The AMPEL Nanofabrication Facility is a fee-based laboratory open to UBC and outside users, as a service, or for trained users. As a service laboratory in Vancouver, our experienced process staff are available to perform fabrication tasks ranging from single steps to full device fabrication. To gain access to the facility and for any other enquiries, please email qmi-anf-at-lists.ubc.ca.

Equipment reservations are made through Bumblebee …

Note:  As per UBC IT requirements our Bumblebee booking system can only be accessed via UBC VPN when outside of campus.   For people outside UBC needing access to the sites, we can help you obtain a CWL Guest Account (preferred method) or in exceptional cases, access through a firewall.  Here is the link to help you setup the UBC VPN: https://it.ubc.ca/services/email-voice-internet/myvpn/setup-documents.

News

  • Facility Status
Current issues: (June 24, 2025)
  • The Filmetrics has arrived at factory for repairs
News & Announcements
  • New RTA installed; trainings now available with Mario
  • New SLACK channel #training requests
  • Summer Skills Program: postponed
  • Next Orientation Lecture
  • TBD, generally none during the summer: Contact qmi-anf_at_lists.ubc.ca to reserve a spot
SBQMI is now part of Quantum Colab https://quantumcolab.ca/
Current Cleanroom Conditions: To see the current equipment status, please click on the following link:
Equipment Status
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image - CMC link
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SBQMI Advanced Nanofabrication Facility
Vancouver Campus
2355 East Mall
Vancouver, BC Canada V6T 1Z4
Tel 604 827 3228
Website www.nanofab.ubc.ca
Email anf@ampel.ubc.ca
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