Equipment Status

Current Equipment Status


Equipment Name Current Status Notes
AJA evaporator/sputter Online Restricted to pure metals
DeeDirectors evaporator Online Room 449
NxQ4006 aligner Online Please remember to turn off nitrogen
Heidelberg MLA150 maskless Online Contact Matthias for training/access
JBX-81OOFS Ebeam Lithography Online Room 65;
Oxford ICP etcher Online restricted to shallow Si etching
ECR etcher Online Room 449
Xactix XeF2 etcher Offline Expected online mid Nov
PE-50 plasma asher Online
Trion PECVD Offline
Expected online mid Nov
Vanguard Photonics PWB tool Online Under commissioning
PECVD Online note
Wetbench ISO-5 yellow room Online Reserved for EBL processes
            200 mm Headway spinner Online Reserved for EBL resists only
Wetbench ISO-6 yellow room Online Photolithography processes only
            Headway spinner Online Reserved for “regular type” resists
            Laurell spinner Offline Under repairs.  Reserved for SU-8 type resists
Dektak XT profilometer Online
Alpha Step 200 profilometer Online Room 449; vintage 1983 machine
Filmetrics reflectometer Online
4 point probe Online
MTI muffle furnace Offline Room 449
Environmental probe station Offline Room 449; hope online before end of year
Miele glassware washer Offline hope online before end of year
Agilent leak detector Online For use by ANF personnel only
DAD3240 dicing saw Online Room 449: Use by ANF personnel only