Equipment Status

Current Equipment Status


Equipment Name Current Status Notes
AJA evaporator/sputter Online
Restricted to pure metals
DeeDirectors evaporator Online
Room 449
NxQ4006 aligner Online Please remember to turn off nitrogen
Heidelberg MLA150 maskless Online Contact Matthias for training/access
JBX-81OOFS Ebeam Lithography Online Room 65;
Oxford ICP etcher Online restricted to shallow Si etching
ECR etcher Online Room 449; First use with Mario only
Xactix XeF2 etcher Online First tests completed July 8, 2021 by MB
PE-50 plasma asher Online
Trion PECVD Online
For SiN deposition & CF4/O2 etching; SiO2 deposition in a few weeks.
Vanguard Photonics PWB tool Online Optical waveguides to interface fibers with photonic devices & circuits
PECVD Offline Pump problem due to power shutdown. SiN deposition; CF4/O2 etching
Wetbench ISO-5 yellow room Online Reserved for EBL processes
            200 mm Headway spinner Online Reserved for EBL resists only
Wetbench ISO-6 yellow room Online Photolithography processes only
            Headway spinner Online Reserved for “regular type” resists
            Laurell spinner Offline Under repairs.  Will be stored as spare spinner
Dektak XT profilometer Online
Nanosurf/Surfscan Atomic Force Microscope Online Current tips for use in tapping mode
Alpha Step 200 profilometer Online Room 449; vintage 1983 machine
Filmetrics reflectometer Online
4 point probe Online
MTI muffle furnace Online Room 449
Environmental probe station Offline Room 449; hope online early 2021
Miele glassware washer Offline Need travel restrictions to ease for commissioning
Agilent leak detector Online For use by ANF personnel only
DAD3240 dicing saw Online Room 449: Use by ANF personnel only