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SBQMI Advanced Nanofabrication Facility (ANF)
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» Home » Processes

Processes

InP ingot and waferProcessing links and resources

 

 

KLayout logoKLayout tutorial from UWaterloo

 

 

HPIM1357SOP for Peroxide forming chemicals

 

 

HPIM1357Plasma processes

 

 

glass wet etchCleaning and wet eching

 

 

Karl SussPhotolithography

 

 

HPIM1360Thin film deposition

 

SBQMI Advanced Nanofabrication Facility
Vancouver Campus
2355 East Mall
Vancouver, BC Canada V6T 1Z4
Tel 604 827 3228
Website www.nanofab.ubc.ca
Email anf@ampel.ubc.ca
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