Kostis Michelakis, Director
Email: kostis.michelakis@ubc.ca
Phone: 604-827-3228
or
Mario Beaudoin
Email: beaudoin@physics.ubc.ca
Phone: 604-822-1853
Nanofab status
Equipment Status
Equipment Reservation
Wetbench SOP
Other
JEOL JBX-8100FS ELECTRON-BEAM LITHOGRAPHY SYSTEM
Heidelberg MLA-150 Maskless Lithography System
Neutronix-Quintel NxQ4006: 100mm mask aligner
Photonic Wire Bonder – Vanguard Photonics
HEADWAY PWM32 and PWM50: Photoresist spinners
LAURELL WS-400-6NPP-LITE: Photoresist spinner
CANON PLA-501F: Double Side Mask Aligner