Current Equipment Status
(last update: February 16, 2023)
| Equipment Name | Current Status | Notes |
|---|---|---|
| AJA evaporator/sputter | 3/4 Online |
Restricted to pure metals – load arm still in need of adjustments – contact Andrey for info/access |
| DeeDirectors evaporator | Online | Room 449 – 8 materials including Au, Cr, Ti, Al, Ni – (Pd, SiO2, Ge) |
| NxQ4006 aligner | Online | Please remember to turn off nitrogen |
| Heidelberg MLA150 maskless | Online | Contact Matthias for training/access (should be back week of May 23) |
| JBX-81OOFS Ebeam Lithography | Online | Room 65; |
| Oxford ICP etcher | Online | restricted to shallow Si etching |
| Samco RIE etcher | Online | Restricted use to be discussed with ANF staff |
| ECR etcher | Online | Room 449 – turned off but in working order |
| Xactix XeF2 etcher | Online | For selective etching of Si |
| PE-50 plasma asher | Online | |
| Trion PECVD | Online |
For SiN and SiO2 deposition & CF4/O2 etching |
| Vanguard Photonics PWB tool | Online | Optical waveguides to interface fibers with photonic devices & circuits |
| Wetbench ISO-6 white room | Online | Only bench for dangerous processes; also for processes that don’t require yellow light |
| Wetbench ISO-5 yellow room | Online |
Reserved for EBL processes |
| 200 mm Headway spinner | Online | Reserved for EBL resists only |
| Wetbench ISO-6 yellow room | Online | Photolithography processes only |
| Headway spinner | Online |
Reserved for “regular type” resists |
| Laurell spinner | Offline | Under repairs. Will be stored as spare spinner |
| Dektak XT profilometer | Online | |
| Nanosurf/Surfscan Atomic Force Microscope | Online | Current tips for use in tapping mode |
| Filmetrics reflectometer | Online | |
| 4 point probe | Online | |
| Microscopes with CCD cameras | Online | Now one microscope per room |
| MTI muffle furnace | Online | Room 449 |
| Miele glassware washer | Online | Use by ANF personnel only |
| Agilent leak detector | Online | For use by ANF personnel only |
| Tresky Die Bonder | Online | Room 449: Use by ANF & SiEPICfab personnel only |
| TPT wire bonder | Online | Room 449: Use by ANF & SiEPICfab personnel only – |
| DAD3240 dicing saw | Online | Room 449: Use by ANF personnel only |