AJA UHV Ebeam and Sputter Evaporator
AJA UHV Hybrid Evaporator
Location: ISO-6 white room
The SBQMI Nanofabrication Facility has an AJA load-locked, ultra-high-vacuum (UHV), hybrid deposition system. It is dedicated to high-purity evaporation of non-magnetic materials.
DEEDIRECTORS2015: 8 source load-lock electron beam evaporator
Location: Brim449
This is a high vacuum system expected to come online sometime in 2014. In this system, up to six various materials can be evaporated in a single process. A load-lock will allows samples to be loaded without exposing the main chamber to air thus greatly reducing pumpdown time. The film thickness is controlled during evaporation with a thickness monitor.
TRION: PECVD/RIE system
Location: ISO-6 white room
This system uses di-ethyl silane (DES), NH3, N2, N2O for the PECVD deposition of Si3N4 and SiO2. It is also used as an RIE etcher for these materials with CF4/O2 chemistry as well as for O2 ashing/descum.
POS Labcoter: Parylene Coater
Location: MSL room NCE 339
This system uses parylene dimer to coate samples with a parylene film.