HEADWAY PWM32 and PWM50: Photoresist spinners

Contents: 

Image - Headway PWM32 photoresist spinner

Headway PWM32 photoresist spinner

These programmable spinners allows spinning various photoresists on wafers of various sizes. Both spinners operate the same way and thus only one SOP is presented for both.

Note that the spinner in ISO-6 yellow room is reserved for “normal” resists whereas the big spinner in the ISO-5 yellow room wetbench is reserved for Ebeam lithography resists ZEP and PMMA.

Operation:
Superuser: Mario, Andrey, Khush
Image - wetbench in ISO-5 room

Wetbench in ISO-5 room with 200mm Headway spinner