Analysis

FILMETRIX F20: Thin film thickness measurement systemFilmetrix pic

Location: ISO-6 white room

This instrument is used to measure the thickness of transparent and semi-transparent thin films via reflection or transmission spectroscopy.  Films as thin as a few tens of nm can be measured when the UV light is turned on.  An SOP will be coming soon.

 

Nikon: Microscopes with CCD camera

Location: 1 in each of the yellow rooms

This microscope can image in bright/dark fields. It can be used for simple imaging and also does Nomarski microscopy. Image capture is via a CCD camera.

 

ZEISS: Microscope with CCD camera Nomarski_microscope

Location: ISO-6 white room

This microscope can image in bright/dark fields. It can be used for simple imaging and also does Nomarski microscopy. Image capture is via a CCD camera.

 

 

DektakDEKTAK XT: Profilometer with 3D capability

Location: ISO-6 white room

This semiautomatic profilometer can be used for single and multiple scans. It provides data on a film thickness, or on a surface roughness and also allows 3D visualization of the scanned structures.  It can moreover be used to measure stress of thin films.

 

SR-4 Four Point Probe EverBeing SR-4, Sheet Resistivity, 4-Point Probe

Location: ISO-6 white room

This 4 point probe can be used to measure the resistivity of various films.

 

 

Easy Scan 2 image Easy Scan 2 Atomic Force Microscope

Location: ISO-6 white room

This student level AFM microscope is easy to use and generates nice images. It currently has tips for tapping mode measurements but other tips can be purchased.