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SBQMI Advanced Nanofabrication Facility (ANF)
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» Home » Processes » Processing links and resources

Processing links and resources

image - etching resources table

Table – etching chemicals

        • Anisotropic-si-etch
        • willamsk-etching micromach
        • willamsk-etching micromach – Part II
        • PMMA RESIST
        • PMMA Developer
        • etch-rate-database
        • Clawson2001_III-V_etching
        • AZ 5200-E IR image reversal photoresist
        • AZ 4620 thick resist
        • AZ 40XT-11D Photoresist
        • AZ P4000 Series Presentation
        • AZ P4000 Product Bulletin
        • Omnicoat adhesion promoter data sheet
        • SU-8 2000.5-2015 data sheet
        • SU-8 2025-2075 data sheet
        • SU-8 2100 series data sheet
        • KAM-LOR-PMGI data sheet
        • MCC-80/20 Primer data sheet
SBQMI Advanced Nanofabrication Facility
Vancouver Campus
2355 East Mall
Vancouver, BC Canada V6T 1Z4
Tel 604 827 3228
Website www.nanofab.ubc.ca
Email anf@ampel.ubc.ca
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