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» Home » Processes » Plasma processes

Plasma processes

image: Oxford COBRA ICP etcherhttps://www.nanofab.ubc.ca/equipment/etching-4/oxford-cobra-icp-etcher/

 

 

 

 

 

image: Samco RIE 10-NR etcherhttps://www.nanofab.ubc.ca/equipment/etching-4/samco-rie-10nr/

 

 

 

 

 

 

image: TRION PECVD/RIEhttps://www.nanofab.ubc.ca/equipment/thin-film-deposition/trion-rie-pecvd/

 

 

 

 

plasmaquest

https://www.nanofab.ubc.ca/equipment/etching-4/ecr-etcher/

 

 

 

 

 

https://www.nanofab.ubc.ca/equipment/etching-4/pe-50-planar-etcher/

 

 

 

  Handbook of Plasma Processing Technology – Fundamentals, Etching, Deposition, and Surface Interactions

SBQMI Advanced Nanofabrication Facility
Vancouver Campus
2355 East Mall
Vancouver, BC Canada V6T 1Z4
Tel 604 827 3228
Website www.nanofab.ubc.ca
Email anf@ampel.ubc.ca
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