Current Equipment Status
(last update: March 31, 2025)
| Equipment Name | Current Status | Notes |
|---|---|---|
| AJA evaporator/sputter | Online |
Slight adjustment issues are underway |
| DeeDirectors evaporator | Online | Room 449 – 8 materials including Au, Cr, Ti, Al, Ni – (Pd, Pt, SiO2, Ge, Ag) |
| NxQ4006 aligner | Online | Please remember to turn off nitrogen |
| Heidelberg MLA150 maskless | Online | Contact Matthias for training/access (should be back week of May 23) |
| JBX-81OOFS Ebeam Lithography | Online | Room 65; |
| Oxford ICP etcher | Online | restricted to shallow Si etching; |
| Samco RIE etcher | Online | Restricted use to be discussed with ANF staff |
| ECR etcher | Online | Room 449 – turned off but in working order |
| Xactix XeF2 etcher | Online | For selective etching of Si |
| PE-50 plasma asher | Online | |
| Trion PECVD | Online | For SiN and SiO2 deposition & CF4/O2 etching |
| Vanguard Photonics PWB tool | Online | Optical waveguides to interface fibers with photonic devices & circuits |
| Wetbench ISO-6 white room | Online | Only bench for dangerous processes; also for processes that don’t require yellow light |
| Wetbench ISO-5 yellow room | Online |
Reserved for EBL processes |
| 200 mm Headway spinner | Online | Reserved for EBL resists only |
| Wetbench ISO-6 yellow room | Online | Photolithography processes only |
| Headway spinner | Online |
Reserved for “regular type” resists |
| Laurell spinner | Online | To be taken out of wetbench after every use. Restricted to special processes |
| Dektak XT profilometer | Online | |
| Nanosurf/Surfscan Atomic Force Microscope | Online | Current tips for use in tapping mode |
| Filmetrics reflectometer F40 | Online | New F40 unit with microscope & camera |
| 4 point probe | Online | |
| Microscopes with CCD cameras | Online | Now one microscope per room |
| MTI muffle furnace | Online | Room 449 |
| Miele glassware washer | Online | Use by ANF personnel only |
| Agilent leak detector | Online | For use by ANF personnel only |
| Tresky Die Bonder | Online | Room 449: Use by ANF & SiEPICfab personnel only – waiting on spare temperature sensor. |
| TPT wire bonder | Online | Room 449: Use by ANF & SiEPICfab personnel only |
| DAD3240 dicing saw | Online | Room 449: Use by ANF personnel only |
| TPT wire bonder | Online | Room 449: Use by ANF & SiEPICfab personnel only – |
| MSL: Litho room | Online | MSL NCE 339 – standard lithography room |
| MSL: Soft Litho room | Online | MSL NCE 339 – soft lithography room |
| MSL Parylene Coater | Online | MSL NCE 339 – middle room |
| MSL Vacuum Oven | Online | MSL NCE 339 – standard lithography room |
| QMI: XPS system | Online | Room 344 – training restricted |
| QMI: SEM microscope | Online | Room 273 – training restricted |
| QMI: Ellipsometer | Online | Room 273 – training restricted |