Search
The University of British Columbia
UBC - A Place of Mind
The University of British Columbia
Vancouver campus
UBC Search
UBC Search
SBQMI Advanced Nanofabrication Facility (ANF)
Home
SAFETY
Facility: Access and Info
People
Equipment
Processes
Contact us
SBQMI
AMPEL
Quantum Colab
»
Home
»
Equipment
»
ANNEALSYS AS-ONE: Rapid thermal processing (RTP) system
Print This Page
ANNEALSYS AS-ONE: Rapid thermal processing (RTP) system
Contents:
In this system wafers can be very fast annealed up to 1200 C.
Operation:
RTP – SOP
Superuser:
Mario Beaudoin
Print This Page