FILMETRIX F20: Thin film thickness measurement system
Location: ISO-6 white room
This instrument is used to measure the thickness of transparent and semi-transparent thin films via reflection or transmission spectroscopy. Films as thin as a few tens of nm can be measured when the UV light is turned on. An SOP will be coming soon.
Nikon: Microscopes with CCD camera
Location: 1 in each of the yellow rooms
This microscope can image in bright/dark fields. It can be used for simple imaging and also does Nomarski microscopy. Image capture is via a CCD camera.
ZEISS: Microscope with CCD camera 
Location: ISO-6 white room
This microscope can image in bright/dark fields. It can be used for simple imaging and also does Nomarski microscopy. Image capture is via a CCD camera.
DEKTAK XT: Profilometer with 3D capability
Location: ISO-6 white room
This semiautomatic profilometer can be used for single and multiple scans. It provides data on a film thickness, or on a surface roughness and also allows 3D visualization of the scanned structures. It can moreover be used to measure stress of thin films.
EverBeing SR-4, Sheet Resistivity, 4-Point Probe
Location: ISO-6 white room
This 4 point probe can be used to measure the resistivity of various films.
Easy Scan 2 Atomic Force Microscope
Location: ISO-6 white room
This student level AFM microscope is easy to use and generates nice images. It currently has tips for tapping mode measurements but other tips can be purchased.