Mech 555: Fundamentals of Microelectromechanical Systems

Instructor:

Mu Chiao
Email: muchiao@mech.ubc.ca

Catalogue Description

Micro-fabrication of MEMS: solid-state technology and other micromachining techniques. Engineering principles of various MEMS devices.

Course Organization

This course includes 3 hours of lecture per week and several visits to the UBC cleanroom (labs) over the entire term. The students will work on one individual class project.

Lecture Topics

History of MEMS
Laws of small scale engineering
Photolithography
Thin film deposition
Oxidation and diffusion
Etching technology
Surface micromachining
Silicon bulk micromachining
Molding and bonding techniques
Standard MEMS processes
Electrical and mechanical concepts
Piezoresistive effect, strain gauges, accelerometers, pressure sensors
Thermal principles and thermal actuators
Thermal resistors and thermal sensors
Electrostatic actuators and sensors
Piezoelectric microdevices
Magnetic microactuators
Optical microdevices
Test and characterization methods

Laboratory Exercises

The clean room visits will be carried out in groups.

Class Project

Each student will work on an individual class project. This includes a presentation in class and a project report.

Assignments

Assignments will be given on a regular basis.

Grading

The final grade of each student will be based on the student’s performance in the assignments, laboratory exercises, the midterm examination, a class presentation, and the class project.

Mech555