https://www.nanofab.ubc.ca/equipment/etching-4/oxford-cobra-icp-etcher/
https://www.nanofab.ubc.ca/equipment/etching-4/samco-rie-10nr/
https://www.nanofab.ubc.ca/equipment/thin-film-deposition/trion-rie-pecvd/
https://www.nanofab.ubc.ca/equipment/etching-4/ecr-etcher/
https://www.nanofab.ubc.ca/equipment/etching-4/pe-50-planar-etcher/