Plasma processes

image: Oxford COBRA ICP etcherhttps://www.nanofab.ubc.ca/equipment/etching-4/oxford-cobra-icp-etcher/

 

 

 

 

 

image: Samco RIE 10-NR etcherhttps://www.nanofab.ubc.ca/equipment/etching-4/samco-rie-10nr/

 

 

 

 

 

 

image: TRION PECVD/RIEhttps://www.nanofab.ubc.ca/equipment/thin-film-deposition/trion-rie-pecvd/

 

 

 

 

plasmaquest

https://www.nanofab.ubc.ca/equipment/etching-4/ecr-etcher/

 

 

 

 

 

https://www.nanofab.ubc.ca/equipment/etching-4/pe-50-planar-etcher/

 

 

 

  Handbook of Plasma Processing Technology – Fundamentals, Etching, Deposition, and Surface Interactions