http://www.nanofab.ubc.ca/equipment/etching-4/oxford-cobra-icp-etcher/
http://www.nanofab.ubc.ca/equipment/etching-4/ecr-etcher/
http://www.nanofab.ubc.ca/equipment/etching-4/pe-50-planar-etcher/
Handbook of Plasma Processing Technology – Fundamentals, Etching, Deposition, and Surface Interactions