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Plasma processes

image: Oxford COBRA ICP etcherhttp://www.nanofab.ubc.ca/equipment/etching-4/oxford-cobra-icp-etcher/

 

 

 

 

 

plasmaquest

http://www.nanofab.ubc.ca/equipment/etching-4/ecr-etcher/

 

 

 

 

 

 

http://www.nanofab.ubc.ca/equipment/etching-4/pe-50-planar-etcher/

 

 

 

  Handbook of Plasma Processing Technology – Fundamentals, Etching, Deposition, and Surface Interactions