Photonic Wire Bonder – Vanguard Photonics

Standard operating procedure Rev 01, O3/20 (beta version)


Rev. 01: Becky Lin


Becky Lin
Mario Beaudoin


This tool allows 3D, 2 photon lithography. It’s main purpose is to create waveguides to mate different photonic circuits together.  The tool will be available soon.

 [Q] – questions


  1. Gather photoresists, applicator, sample into fume hood. Would the photoresist need to be scooped and placed onto a secondary carrier plate? Such as taking out the photoresist from fume hood to the optical microscope? [Q]
  2. Assuming using a secondary carrier plate, use a clean applicator to “scoop” out the approximate needed amount of PWB photoresist. Use a needle applicator to and drop cast PWB photoresist.
  3. Examine the sample with photoresist under an optical microscope.
  4. Take the sample and mount on the chuck of the PWB machine.
  5. Would the vacuum for the chuck always be on? [Q] 
  6. Operate the PWB machine to write the PWBs. May have a machine starting procedure? [Q]
  7. Dismount the sample from PWB chuck and put onto a carrier and bring to fume hood.
  8. Take PGMEA from the chemical safety cabinet into fume hood and pour [insert amount] into a beaker. May need to dilute PGMEA? [Q] 
  9. Put the sample into PGMEA for x amount of time at y temperature. [Q]
  10. Take the sample out of PGMEA and rinse with IPA. Use nitrogen gun to dry the sample
  11. Clean needle applicator using PGMEA and IPA as well? [Q]
  12. Take a second needle applicator and “scoop” out the needed amount of cladding photoresist.
  13. Put the sample under the optical microscope and drop cast cladding photoresist at PWB site(s).
  14. Dismount sample and use UV illumination to cure the cladding photoresist.
  15. Use PGMEA and IPA to clean the second needle applicator.
  16. Dispose PGMEA into the chemical waste bottle.
  17. Clean fume hood and working area.
  18. Put the PWB machine on standby? [Q]