Heidelberg MLA-150 Maskless Lithography System

Image - Heidelberg MLA150 maskless tool

The Heidelberg MLA150 maskless tool in the Class ISO-5 yellow cleanroom (to the right-hand side of wet-bench)

Heidelberg MLA150 SOP Coming Soon

The Heidelberg MLA-150 Maskless Lithography System is installed in the new ISO 5 (class 100) yellow room in the Nanofab cleanrooms.