MTI Muffle furnaceKSL 1100X: Box Furnace

Box (muffle) furnace used for bonding or other thermal treatments.




SmallRTApictureHeatpulse 210: Rapid Thermal Anneal (RTA) System

In this system wafers can be very fast annealed up to 600 C.  This RTA has been recently upgraded and a new SOP for it will be provided in the near future. (System currently offline)