Mech 555: Fundamentals of Microelectromechanical Systems
- Mu Chiao
- Email: email@example.com
Micro-fabrication of MEMS: solid-state technology and other micromachining techniques. Engineering principles of various MEMS devices.
This course includes 3 hours of lecture per week and several visits to the UBC cleanroom (labs) over the entire term. The students will work on one individual class project.
- History of MEMS
- Laws of small scale engineering
- Thin film deposition
- Oxidation and diffusion
- Etching technology
- Surface micromachining
- Silicon bulk micromachining
- Molding and bonding techniques
- Standard MEMS processes
- Electrical and mechanical concepts
- Piezoresistive effect, strain gauges, accelerometers, pressure sensors
- Thermal principles and thermal actuators
- Thermal resistors and thermal sensors
- Electrostatic actuators and sensors
- Piezoelectric microdevices
- Magnetic microactuators
- Optical microdevices
- Test and characterization methods
The clean room visits will be carried out in groups.
Each student will work on an individual class project. This includes a presentation in class and a project report.
Assignments will be given on a regular basis.
The final grade of each student will be based on the student’s performance in the assignments, laboratory exercises, the midterm examination, a class presentation, and the class project.