- ANF suggested photolith recipes
- Anisotropic-si-etch
- willamsk-etching micromach
- willamsk-etching micromach – Part II
- PMMA RESIST
- PMMA Developer
- etch-rate-database
- Clawson2001_III-V_etching
- AZ 5200-E IR image reversal photoresist
- AZ 4620 thick resist
- AZ 40XT-11D Photoresist
- AZ P4000 Series Presentation
- AZ P4000 Product Bulletin
- Omnicoat adhesion promoter data sheet
- SU-8 2000 datasheet
- SU-8 3000 datasheet
- KAM-LOR-PMGI data sheet
Table – etching chemicals