Virtual 3D of the SBQMI/AMPEL ANF Cleanrooms
Main Nanofab Cleanrooms consisting of: ISO 5 (class 100) yellow room ISO 6 (class 1000) yellow room ISO 6 (class 1000) white room Electron Beam Lithography Cleanroom ISO 7 (class 10000) white room JEOL JBX-8100FX 100kV Electron Beam Lithography System Packaging/Workhorse Processes Room […]