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JEOL JBX-81OOFS ELECTRON-BEAM LITHOGRAPHY SYSTEM
By Kostis Michelakis on May 22, 2018
SBQMI has invested heavily on acquiring a state-of-the-art electron-beam lithography tool that enables device fabrication at the nanoscale, where quantum properties of materials manifest themselves. An intense, well formed and focused beam of electrons, scanned by precision electronics and driven by computer design data, can directly write features of a few nanometers in size on […]