The new SBQMI Nanofab cleanroom

The new SBQMI Nanofab cleanroom

Renovated Cleanroom The facility’s cleanroom is contained within Labs 446 in Brimacombe’s AMPEL wing, and the available floor area is obviously limited by the overall room footprint. In the old configuration, a considerable part of this area was taken by so-called gray space, housing, among other things, vacuum systems, process gases, and other support infrastructure. […]

Vanguard Photonic Wire Bonding Tool

Vanguard Photonic Wire Bonding Tool

The SBQMI now has a photonic wire bonding tool:        

JBX-8100FS 100kV EBL tool capable of writing features as small as 5nm on wafers up to 200mm.

JEOL JBX-81OOFS ELECTRON-BEAM LITHOGRAPHY SYSTEM

SBQMI has invested heavily on acquiring a state-of-the-art electron-beam lithography tool that enables device fabrication at the nanoscale, where quantum properties of materials manifest themselves. An intense, well formed and focused beam of electrons, scanned by precision electronics and driven by computer design data, can directly write features of a few nanometers in size on […]

ACTUATED SCANNING MICROLENS FOR NIR RAMAN SPECTROSCOPY

ACTUATED SCANNING MICROLENS FOR NIR RAMAN SPECTROSCOPY

Chin-Pang-Billy Siu and Mu Chiao Dept of Mechanical Engineering, The University of British Columbia, Canada Haishan Zeng, BC Cancer Agency, Canada   This paper presents the design, fabrication and characterization of a magnetically actuated scanning microlens for miniature confocal Near Infrared (NIR) Raman spectroscopy. One of the potential applications could be on non-invasive skin cancer […]

Room-temperature operation of a transistor vertical-cavity surface-emitting laser

Room-temperature operation of a transistor vertical-cavity surface-emitting laser

X. Yu, Y. Xiang, J. Berggren, T. Zabel, M. Hammar, N.Akram, W. Shi and L. Chrostowski We demonstrate the first room-temperature operation of a transistor vertical-cavity surface-emitting laser (T-VCSEL). Fabricated using an epitaxial regrowth process, the T-VCSEL is electrically a Pnp-type bipolar junction transistor and consists of an undoped AlGaAs/GaAs bottom DBR, an InGaAs triple-quantum-well […]

Ebeam lithography for nanometer scale devices
Synthesis of polycrystalline InSb nanowires by template assisted electrodeposition

Synthesis of polycrystalline InSb nanowires by template assisted electrodeposition

M. Beaudoin, H.J. Kim and J. Wang Advanced Nanofabrication Facility, AMPEL, University of British Columbia 2355 East Mall, Vancouver, BC V6T 1Z4 A, Ahktari-Zavareh and K. L. Kavanagh Department of Physics, Simon Fraser University, 8888 University Drive, Burnaby, BC V5A 1S6   InSb nanowires (NW) have been synthesized by pulsed electrodeposition using anodic alumina membranes […]